SEMI F47 Testing

Intertek offers SEMI F47 testing, the voltage sag immunity used in the semiconductor manufacturing industry. The portable Industrial Power Corruptor allows testing to be performed on-site at client locations.

Industrial Power Corruptor Specifications:

Input Power: 

  • 100-480 Vrms, 50 A continuous, 50-60 Hz
  • Single phase, 3 phase wye or delta

Phase to Phase / Phase to Neutral Sags: 

  • Sag magnitude: 0%-125% in 2.5% steps
  • Sag duration: 0.1 cycle to 34 seconds in 0.1 cycle increments
  • Phase angle synchronization: 0-359 degrees in 1 degree steps

3-Phase Dropouts: 

  • Duration: 0.3-34 seconds
  • Phase angle synchronization: 0-355 degrees in 5 degree steps

Measurement Capabilities: 

  • 13 internal voltage channels
  • 6 internal current channels
  • 3 internal protective earth channels
  • 3 +/- 600 V (AC or DC) external inputs
  • 6 +/- 100 V (AC or DC) external inputs

Test Standards include: 

  • SEMI F47
  • IEC/EN 61000-4-11
  • IEC/EN 61000-4-34
  • SEMI E6 (using power flow analysis package)
  • Others